中電48所鞏小亮： SiCSiC功率器件制造裝備技術及發展趨勢Technology and development trends of SiC power devices manufacturing equipment鞏小亮中國電子科技集團公司第四十八研究所、半導體裝備研究部主任Xiaoliang GONGDirector of Semiconductor equipment research department, The 48th Research Institute of China Electronics Technology Group Corporation
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